FABRICATION MANAGEMENT SYSTEM

专利名称：FABRICATION MANAGEMENT SYSTEM发明人：Nagaraj Savithri申请号：US12420666申请日：20090408

公开号：US20090250698A1公开日：20091008

专利附图：

摘要：With the evolution of technology, there is a continual demand for enhancedspeed, capacity and efficiency. A modular, chip testing system associated with a singlechip on a wafer is described. This system includes a performance structure for measuringchip performance during a testing period; a power structure for measuring chip power

during the testing period; an interconnect structure for measuring characteristics ofinterconnects within the chip during the testing period; a device structure for measuringcharacteristics of devices within the chip during the testing period; and a plurality ofprobe pads coupled to the performance structure, power structure, interconnectstructure, and the device structure, wherein the plurality of probe pads receive signalsduring the testing period that enable the modular, chip testing system to measurecharacteristics of the interconnects, characteristics of the devices, chip power, and chipperformance.

申请人：Nagaraj Savithri

地址：Richardson TX US

国籍：US

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