专利名称：Interferometric analysis of surfaces发明人：De Groot, Peter J.申请号：EP10177299.4申请日：20040915公开号：EP2275868A1公开日：20110119
专利附图：
摘要：A method for determining a spatial property of an object includes obtaining ascanning low coherence interference signal from a measurement object that includes twoor more interfaces. The scanning low coherence interference signal includes two or moreoverlapping low coherence interference signals, each of which results from a respective
interface. Based on the low coherence interference signal, a spatial property of at leastone of the interfaces is determined. In some cases, the determination is based on asubset of the low coherence interference signal rather than on the entirety of the signal.Alternatively, or in addition, the determination can be based on a template, which may beindicative of an instrument response of the interferometer used to obtain the lowcoherence interference signal.
申请人：Zygo Corporation
地址：21 Laurel Brook Road Middlefield, CT 06455-0448 US
国籍：US
代理机构：Epping - Hermann - Fischer
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