Vacuum processing system

专利名称：Vacuum processing system

发明人：Davis, Cecil,Wooldridge, Timothy A.,Carter,

Duane E.,Spencer, John E.,Matthews,Robert,Hildenbrand, Randall C.

申请号：EP931062.8申请日：19861017公开号：EP05550A3公开日：19930915

专利附图：

摘要：A wafer transfer arm (28) for transferring semiconductor wafers (48) comprisesan arm, extensible in a radial direction and pivotable in an angular direction about an axis

at right angles to the radius. Support means (50) are provided at the distal end of thewafer transfer arm (28) said support means (50) being adapted for supporting a wafer(28) substantially by edge contact alone.

申请人：TEXAS INSTRUMENTS INCORPORATED

地址：13500 North Central Expressway Dallas Texas 75265 US

国籍：US

代理机构：Schwepfinger, Karl-Heinz, Dipl.-Ing.

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