Charged-particle-beam optical systems including be

专利名称：Charged-particle-beam optical systems

including beam tube exhibiting reducededdy currents

发明人：Katsushi Nakano申请号：US09875330申请日：20010605

公开号：US20010051317A1公开日：20011213

摘要：Charged-particle-beam (CPB) optical systems are disclosed that exhibit reducededdy currents forming in the beam tube of the system. The eddy currents otherwisewould degrade beam-control response time of the system. In an embodiment, the beamtube defines at least one slit in an “eddy-current zone” of the beam tube adjacent anenergizable coil of the system, such as a deflector coil. The slit(s) is situated so as todivide the eddy-current zone. The slit(s) extends at least part way through the thicknessdimension of the beam tube and can be formed using conventional machine tools, wirecutting, or electrical-discharge machining, or other suitable technique. Compared to aneddy-current zone lacking a slit, the divided eddy-current zones produced by the slit(s)have substantially reduced overall area, thereby reducing eddy current in the beam tubeand allowing a corresponding increase in beam-control speed.

申请人：NIKON CORPORATION

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