专利名称：VARIABLE RESISTANCE ELEMENT AND
METHOD FOR FABRICATING THE VARIABLERESISTANCE ELEMENT
发明人：Munehiro TADA申请号：US16086695申请日：20170323
公开号：US20190074437A1公开日：20190307
专利附图：
摘要：To stabilize programming operation and to reduce leakage current. A variableresistance element according to the present invention is provided with: an interlayer
insulating film; a first electrode that is formed within the interlayer insulating film andcomprises an active electrode, the side surface and the bottom surface of which arecovered by a barrier metal; a variable resistance film that is formed on the upper surfaceof the first electrode; a second electrode that is formed on the variable resistance film;and an insulating film spacer that is formed between the variable resistance film and thebarrier metal which covers the side surface of the first electrode. In this connection, thevariable resistance film and the barrier metal which covers the side surface of the firstelectrode are in contact with the insulating film spacer, respectively.
申请人：NEC Corporation
地址：Minato-ku, Tokyo JP
国籍：JP
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