专利名称:Capacitor constructions
发明人:Marsela Pontoh,Cem Basceri,Thomas M.
Graettinger
申请号:US10841686申请日:20040506
公开号:US20040245559A1公开日:20041209
专利附图:
摘要:The invention includes methods of forming rugged electrically conductivesurfaces. In one method, a layer is formed across a substrate and subsequently at leastpartially dissociated to form gaps extending to the substrate. An electrically conductive
surface is formed to extend across the at least partially dissociated layer and within thegaps. The electrically conductive surface has a rugged topography imparted by the atleast partially dissociated layer and the gaps. The topographically rugged surface can beincorporated into capacitor constructions. The capacitor constructions can be
incorporated into DRAM cells, and such DRAM cells can be incorporated into electricalsystems.
申请人:PONTOH MARSELA,BASCERI CEM,GRAETTINGER THOMAS M.
更多信息请下载全文后查看
因篇幅问题不能全部显示,请点此查看更多更全内容